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Applied Physics Letters : Acceleration insensitive encapsulated silicon microresonator

By C. M. Jha, J. Salvia, S. A. Chandorkar, R. Melamud, E. Kuhl et al

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Book Id: WPLBN0002169266
Format Type: PDF eBook :
File Size: Serial Publication
Reproduction Date: 10 December 2008

Title: Applied Physics Letters : Acceleration insensitive encapsulated silicon microresonator  
Author: C. M. Jha, J. Salvia, S. A. Chandorkar, R. Melamud, E. Kuhl et al
Volume: Issue : December 2008
Language: English
Subject: Science, Physics, Natural Science
Collections: Periodicals: Journal and Magazine Collection, Applied Physics Letters Collection
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Publisher: American Institute of Physics

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Jha, J. Salvia, S. A. Chandorkar, R. Melamud, E. Kuhl Et A, C. M. (n.d.). Applied Physics Letters : Acceleration insensitive encapsulated silicon microresonator. Retrieved from http://worldebookfair.com/


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Description: This paper presents the acceleration sensitivity and the resulting vibration-induced phase noise of an electrostatically coupled encapsulated silicon microresonator. External vibrations can produce phase noise in microresonators by generating time-varying stress in the resonant beams. A spring mounted resonator design that reduces the induced axial stress is presented here. Measurements and simulations show that the acceleration sensitivity and the vibration-induced phase noise of this device can be reduced 1000 times smaller than that of the previously published silicon microresonator and 10 times smaller than the commercially used high end SC (stress compensated)-cut quartz resonator.

 

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